发明名称 |
VERTICAL VESSEL FOR GROWING CRYSTAL AND METHOD FOR GROWING CRYSTAL |
摘要 |
PROBLEM TO BE SOLVED: To provide a vertical vessel for growing a crystal with which breakage of the bottom part of the vessel due to the weight or falling of a raw material can be suppressed and to provide a method of growing the crystal. SOLUTION: The vertical vessel 10 for growing a crystal has a seed crystal arranging part 1c where a seed crystal is arranged and a main vessel 1 capable of arranging a semiconductor raw material to be used for growing the crystal, at the upper part of the seed crystal arranging part 1c, and further has a raw material supporting part 2 capable of supporting a portion 13 of the raw material in such a manner that the portion 13 of the raw material can be isolated from the other raw material 3 being arranged at the upper part of the seed crystal arranging part 1c.
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申请公布号 |
JP2001163694(A) |
申请公布日期 |
2001.06.19 |
申请号 |
JP19990350716 |
申请日期 |
1999.12.09 |
申请人 |
SUMITOMO ELECTRIC IND LTD |
发明人 |
SAWADA SHINICHI;NAKAI RYUSUKE;HANEKI YOSHIAKI;KAWARABAYASHI SHIGERU |
分类号 |
H01L21/208;C30B11/00;(IPC1-7):C30B11/00 |
主分类号 |
H01L21/208 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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