发明名称 |
Surface micro-machined acoustic transducers |
摘要 |
A micro-machined transducer having a structure in which an acoustic enclosure is formed on a substrate above the plane of the substrate surface is disclosed. Forming the acoustic enclosure on the substrate above the plane of the substrate surface, rather than an acoustic cavity in a surface of the substrate, provides an acoustic cavity whose size is not limited by the thickness of the substrate.
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申请公布号 |
US6249075(B1) |
申请公布日期 |
2001.06.19 |
申请号 |
US19990442984 |
申请日期 |
1999.11.18 |
申请人 |
LUCENT TECHNOLOGIES INC.;AGERE SYSTEMS |
发明人 |
BISHOP DAVID JOHN;BOIE ROBERT ALBERT;PARDO FLAVIO |
分类号 |
H04R19/00;(IPC1-7):G01L1/16;G01L1/18;H01L41/053;H01L41/113 |
主分类号 |
H04R19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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