,申请号JP19970531466-传众专利搜索

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发明名称
摘要
申请公布号	JP2001508226(A)	申请公布日期	2001.06.19
申请号	JP19970531466	申请日期	1997.03.03
申请人		发明人
分类号	H01J37/32;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):H05H1/46;H01L21/306	主分类号	H01J37/32
代理机构		代理人
主权项
地址

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