| 摘要 |
PROBLEM TO BE SOLVED: To prevent the breakage of an article to be polished caused by variations in the number of revolutions when setting the number of revolutions at an established number of revolutions in a specific processing step. SOLUTION: In a control circuit controlling the rotation of a lower surface plate, an upper surface plate, a sun gear, and an internal gear, a circuit is integrated for setting the number of revolutions at an established number of revolutions by manually operating a speed adjusting volume in a specific processing step. The speed adjusting volume sets the established number of revolutions of the specific processing step 100%, and has large resolution and a wide operation range when manually operated, so that the number of revolutions can be smoothly increased up to the established number of revolutions, thereby preventing the breakage and the like of an article to be polished caused by abrupt applying of a load on the article to be polished due to the change in the number of revolutions when increasing the number of revolutions. |
