发明名称 Low cost method of fabricating transient voltage suppressor semiconductor devices or the like
摘要 Transient voltage suppressor semiconductor devices and other semiconductor devices having rigorous requirements for the diffusion and depth of impurities to produce P-N junctions can be fabricated at surprisingly low costs without sacrifice of functional characteristics by subjecting the substrate to a grinding process resulting in a surface short of polishing perfection, thereby to eliminate the time-consuming and hence costly conventional polishing operation, and then diffusing the desired impurity into the substrate from a solid impurity source.
申请公布号 US6248651(B1) 申请公布日期 2001.06.19
申请号 US19980103731 申请日期 1998.06.24
申请人 GENERAL SEMICONDUCTOR, INC. 发明人 ENG JACK;CHAN JOSEPH;ZAKALUK GREGORY;AMATO JOHN;GARBIS DENNIS
分类号 H01L21/225;H01L21/304;(IPC1-7):H01L21/225;H01L21/302 主分类号 H01L21/225
代理机构 代理人
主权项
地址