发明名称 ELECTRICALLY CONDUCTIVE PHOTOSELECTIVE TRANSMISSIVE SHEET
摘要 PROBLEM TO BE SOLVED: To produce a plastic sheet having excellent electrical conductivity and also good in the transmissivity of visible light. SOLUTION: This electrically conductive photoselective transmissive sheet is obtained by providing the surface of a transparent substrate sheet (1) composed of plastics with a laminated film (5) consisting of an electrically conductive metal (e.g. Cu) thin film (2) and ceramics thin films (3 and 4) of metallic nitride (e.g. AlN) laminated on the upper and lower parts thereof. Preferably, by a low energy sputtering method under a sputter voltage of -50 to -300 V, film deposition is performed in such a manner that the film thickness of the metallic thin film (2) is controlled to 1 to 50 nm, and the film thickness of the ceramic thin films (3 and 4) is controlled to 10 to 500 nm.
申请公布号 JP2001164382(A) 申请公布日期 2001.06.19
申请号 JP19990344548 申请日期 1999.12.03
申请人 OSAKA PREFECTURE;HIRANO KOON KK 发明人 OGAWA SOICHI;YOSHITAKE MASAAKI;IGARASHI TADANORI
分类号 C23C14/06;C23C14/14;C23C28/00;(IPC1-7):C23C28/00 主分类号 C23C14/06
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