| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a sorting control system for a substrate efficiently controlling the information of the sorted substrate and cassettes without imposing a burden on an operator. SOLUTION: A detector 2 writes the detection results of the substrates in an ID plate of the cassette for storing the substrates and reports them to a host computer 4. On the other hand, when receiving the cassette from the detector 2, a substrate division part 32 of a substrate division device 3 sorts the substrates based on the detection results written in the ID plate and stores the movement results in a movement information storage part 33. When the original sorting cassette becomes empty, CIM communication part 34 reads the movement results of the movement information storage part 33 and reports them to the host computer 4. Corresponding thereto, a data recognition part 44 of the host computer 4 recognizes that there is no unconformity in the report based on the reports from the both devices 2, 3 and renews the stock data of the substrates based on only the normal reports.</p> |
