发明名称 Display device and manufacturing method
摘要 A gate electrode, silicon nitride film, silicon oxide film and silicon film are formed on an insulating substrate. A silicon oxide film and silicon nitride film are formed on the silicon film, and first and second contact holes are formed which penetrate these films. An electrode in contact with a drain area is arranged via the first contact hole. The whole is covered with a plagiarizing film, a third contact hole of smaller diameter than that of the second contact hole is formed corresponding to the second contact hole embedded by the planarizing film, and a transparent electrode in direct contact with a source area is arranged via the third contact hole. In this way, the contact resistance between the transparent electrode and the source area is reduced, and a simplified construction display device is obtained wherein the contact reliability of both electrodes is improved.
申请公布号 US6249330(B1) 申请公布日期 2001.06.19
申请号 US19980160839 申请日期 1998.09.25
申请人 SANYO ELECTRIC CO., LTD. 发明人 YAMAJI TOSHIFUMI;ODA NOBUHIKO
分类号 G02F1/1343;G02F1/136;G02F1/1362;G02F1/1368;H01L21/336;H01L21/768;H01L23/522;H01L29/786;(IPC1-7):G02F1/133 主分类号 G02F1/1343
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