发明名称 System of modular substrates for enabling the distribution of process fluids through removable components
摘要 A fluid panel subassembly comprising: a component; substrate a seal, a body, and an insert; wherein the body is fastened to the insert to form a substrate with the substrate seal therein, and the component is fastened to the body such that, the component is positioned over the substrate seal.
申请公布号 AU4518001(A) 申请公布日期 2001.06.18
申请号 AU20010045180 申请日期 2000.12.06
申请人 INSYNC SYSTEMS, INC. 发明人 KIM NGOC VU
分类号 A61M39/00;F16K27/00;H01L21/00 主分类号 A61M39/00
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