| 摘要 |
A system for regulating and monitoring the delivery of a flow of a gas from a gas source to an output flow of a gas delivery device, wherein the gas is comprised of at least one specialty gas and preferably greater than one specialty gas. The system comprises a delivery unit and a sampling unit. The delivery unit is connectable with the gas source and the output flow of the gas delivery device for delivering the flow of the gas from the gas source to the output flow at an injection site defined thereby, wherein the delivery unit is comprised of an adjustable device for regulating the flow of the gas therethrough. The sampling unit is connectable with the output flow of the gas delivery device at a location downstream of the injection site for removing a gas sample from the output flow, wherein the sampling unit is comprised of a sample monitoring device for providing feedback on the composition of the gas sample. Preferably, the feedback is provided on a continuous basis. |
