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发明名称
摘要
申请公布号	JP3177736(B2)	申请公布日期	2001.06.18
申请号	JP19970269213	申请日期	1997.09.17
申请人		发明人
分类号	H01L21/304;B08B3/10;F04B43/04;F04B43/073;H01L21/00;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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