| 摘要 |
PURPOSE: To provide a lamp unit and light irradiating system heating device which exhibit a large lamp input density, can achieve efficient lamp cooling with ease, and can heat semiconductor wafers at higher speeds than before. CONSTITUTION: A lamp group is formed by disposing a plurality of filament lamps 4 concentrically within the same plane, and each of the lamps 4 has a filament within an annular light emitting tube 7A or 7B. Further, a plurality of lamp groups are arranged in steps while having a common center, whereby a lamp unit LU is prepared. An introducing port 18 and an exhaust port 19 for cooling wind are arranged in a lamp chamber 1 wherein the unit LU is located. Mirrors 51 are provided on the inner surface of side walls of the chamber 1. A work holding table 3 which is located within a light irradiating chamber 2 at the lower portion of the chamber 1 is made rotatable.
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