PRESSURE TREATMENT APPARATUS

摘要

PURPOSE: A pressure treatment apparatus is provided to enable particle-free treatment and to enhance temperature control accuracy and temperature control response indispensable to the enhancement of productivity. CONSTITUTION: A pressure container(1) is equipped with a cylinder(6) closed at one end thereof and the lid member(4) for closing the opening of the other end of the cylinder(6) and a pressure means for pressing the lid member(4) to the cylinder(6) in the axial direction of the cylinder(6) is provided to the pressure container(1) and a seal member(13) is provided between the opening end surface of the cylinder(6) and the end surface opposed to the opening end surface of the cylinder(6) of the lid member(4). A partition wall housing an object to be treated is provided in the pressure container(1) and a fluid introducing passage is provided to the pressure container(1) so as to allow the greater part of the fluid flowing in the pressure container(1) to flow in the partition wall. A partition wall comprising a heat insulating material is provided between the object to be treated and the pressure container(1) and a filter for catching ultrafine particles is arranged on the inflow side of the fluid of the partition wall.