| 摘要 |
PURPOSE: To provide a method for producing a substrate for a display capable of easily controlling the surface resistance of a thin film for preventing electrification to be formed on the surface of a substrate to the desired value and to provide a substrate for a display produced by this producing method. CONSTITUTION: On the surface on the side in which an element is formed in a glass substrate 10 having, e.g. 3 mm thickness, for preventing electrification on the surface of the substrate 10, a thin film 11 having, e.g. 10 nm thickness is formed by a sputtering method or the like. On the thin film 11, a pair of element electrodes 12 and 13 composed of electrically conductive material are formed. The thin film 11 is formed on the surface of the substrate 10, while the mixing ratio between inert gas and nitrogen in an atmosphere of gas composed of a mixture of inert gas and nitrogen is controlled in such a manner that the thin film shows the surface resistance of 1.0x108 to 1.0x1012 Ω/square, by executing sputtering using a metallic oxide target in the atmosphere of the gas.
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