METHOD FOR FORMING THIN FILM,申请号KR20000001132-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	METHOD FOR FORMING THIN FILM
摘要	PURPOSE: A method for forming a thin film is provided to be capable of forming a dielectric layer under oxygen gas atmosphere without the deterioration of device characteristics. CONSTITUTION: A ruthenium layer or an oxide ruthenium layer is formed by carrying out a CVD(Chemical Vapor Deposition) process using Ru(DMHPD)3. Preferably, the Ru(DMHPD)3 is a liquid state. When the CVD process is carried out on an object part, the liquid Ru(DMHPD)3 is vaporized. Preferably, the ruthenium layer or the oxide ruthenium layer is formed in a predetermined process chamber at the temperature of 300-600 °C. At this time, the predetermined process chamber has a predetermined pressure of 1-10 Torr.
申请公布号	KR100300289(B1)	申请公布日期	2001.06.15
申请号	KR20000001132	申请日期	2000.01.11
申请人	FUJITSU LIMITED	发明人	NAKABAYASHI MASAAKI;TAMURA TETSURO;NOSHIRO HIDEYUKI
分类号	H01L27/108;C23C14/06;C23C16/04;C23C16/18;C23C16/40;H01L21/02;H01L21/285;H01L21/768;H01L21/8242;(IPC1-7):H01L27/108	主分类号	H01L27/108
代理机构		代理人
主权项
地址

您可能感兴趣的专利

Vehicle windscreen wiper has movable element with cam to engage in trough on articulated part when wiper arm is swivelled about articulated joint axis

Device for fixing handles on doors has fixing bolt with pointed front section passing through bore into profiled chamber inside door and with clamping screw to draw expanding sleeve onto tapered section

Abwasser-Hebeanlage mit tiefer Absaugung

Verfahren zum Beeinflussen der rheologischen Eigenschaften eines Fluids

Electrical coupling, especially a 3-phase coupling, has an integrated separating mechanism that performs, supports or facilitates separation of the connection

Clinker brink for producing facing brick uses the outer longitudinal side walls and cross side walls and the webs separating the hollow cavities between same

Lifting, tensioning and pressing appliance has pulley block cable fixed to ends of polygonal pipe elements by means of deflector rollers

Cosmetic or dermatological preparations containing cardiolipin, useful e.g. for treatment, care and prophylaxis of sensitive skin and treatment of inflammatory conditions such as eczema or psoriasis

Kabelausziehöffnung

Automatic assistance summoning method, e.g. for aged or infirm persons, using contact via telephone network and server storing details of individual

Semiconductor memory cell device and process for address coding has address coding device and operation mode

Assembly to compress a wet paper or cardboard web for drying, has a lubricant feed at the elastic belt in front of the press gap, with side sealing bars to prevent lubricant escaping

Substituierte Benzinmidazole zur Bekämpfung von Endoparasiten

Visco brake or clutch comprises outer and inner parts forming common chamber filled with viscous flow medium and with coupling elements fitted so that during relative rotation

Support wheel arrangement for agricultural harvester etc. with wheel located in support frame, in working connection with harvester and holder device for agricultural tool

Method for chocolate coating ice cream portions without using sticks has an electrical resistor embedded during freezing which holds the block during coating.

Fiber glass used in the production of glass fibers, especially micro-glass fibers, e.g. in the manufacture of filter paper, contains fluorine and oxides of silicon, aluminum, boron, sodium, potassium, calcium, barium and zinc

Heavy current rail has contact pieces fitted between abutting ends of successive tubular contact rail sections

Method for removing water from food products by evacuation has three phases in which the temperature is reduced to freezing point

Moving staircase consists of stepped belt of interlinked steps each with tread surface and front side, with side chains, flanges, roller and guide, and foot cladding