| 摘要 |
PURPOSE: A micro switch is provided to realize the small power loss, the high on/off ratio, the high on-capacitance and the small off/capacitance. CONSTITUTION: The micro switch has a substrate. A transmission line is formed on the substrate and used for a lower electrode of a capacitor. An insulation layer is formed on a predetermined part of the transmission line. A metal electrode is formed on the insulation layer. A mobile plate is formed on the metal electrode at a predetermined interval to it, also used for an upper electrode of the capacitor and thus contacts to the metal electrode according to the external voltage applied.
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