| 摘要 |
PURPOSE: A photo-induced process equipment is provided which solves problems of haze of an optical window and the surface of an optical source, light absorption loss due to the optical window and a purge gas for cleaning and dust generation by operating parts including a flexible curtain, and effectively utilizes light emitted from the optical source. CONSTITUTION: The photo-induced process equipment comprises a reaction chamber housing; an optical source (340) the light emitting surface of which is flat; a heat resistant transparent film (330) which light can penetrates from the optical source; a hangar housing for installing, supplying and carrying the transparent film; a flange (306) to the surroundings of the opening part (311) of the center of which the edge of the light emitting surface of the optical source is welded; an elastic part (370) equipped with a forming bellows or a welding bellows having flanges at the both ends thereof; and a driving means for vertically transferring the flange welded optical source, wherein the sealed structure is not broken when the flange welded optical source is vertically transferred by a driving device.
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