SYSTEM FOR MANUFACTURING SEMICONDUCTOR

摘要

PURPOSE: A system for manufacturing a semiconductor is provided to manufacture a semiconductor product having an optimum quality within a designated date when taking a process condition and a process priority order into consideration. CONSTITUTION: A unit(10) for managing a delivery date calculates delivery data regarding every lot of a plurality of lots concerning the delivery date of the lot. A process optimization unit calculates an optimum process data regarding each lot. A real-time work instructing unit(30) determines a process priority order of the lot with reference to the delivery data and the optimum process data, and calculates data regarding the process priority order. An equipment control unit controls a process of process equipment by using the data regarding the process priority order.