| 摘要 |
PURPOSE: To provide a capacitive acceleration sensor made into a micromachine capable of detecting a lateral direction. CONSTITUTION: The capacitive acceleration sensor which straightens resistance for stiction of detection fingers forming capacitive elements and is made into a micromachine capable of detecting in a lateral direction includes fixed detection fingers (316, 318, 516, 518, 536, 538) formed like beams. Each finger (316, 318, 516, 518, 536, 538) is supported by a plurality of supporting elements or fixing bodies (320, 322, 330, 332, 334, 336, 522, 530). Finger elements (312, 512) added to inertial mass (304, 502) can be fastened with each other at the tips in the same way as the roots. As a result, also hardness of lateral directions and vertical directions of the fingers (316, 318, 516, 518, 536, 538) moving simultaneously is increased. |
