MICRO MECHANICAL LOGIC ELEMENT FOR HIGH TEMPERATURE/LARGE CURRENT

摘要

PURPOSE: A micro mechanical logic element is to eliminate worries for an erroneous operation or the change of operational properties even under an application at a high operation temperature. CONSTITUTION: A fixing part(10) fixes a micro mechanical structure to a substrate by removing a sacrificial layer at a part to be fixed and depositing a structure layer thereto. A driving electrode(20) generating a driving force according to an input signal is arranged under a flat plate(70) of the micro mechanical structure to operate the micro structure by an electrostatic attracting force caused by the difference between the voltages of the input signal and the structure. An etching hole(50) is formed to facilitate removal of the sacrificial layer below the flat plate. An output electrode(40) is formed under the micro structure to be contacted with the structure through an intervened insulating layer. As the structure moves, a protrusion(60) formed on the structure contacts with the output electrode to be electrically connected. A supporting part(30) mechanically connects the protrusion to the fixing part and mechanically moves by a driving force generated from the driving electrode.