METHOD FOR DETERMINING RADIATION INTENSITY OF LAYOUT

摘要

PURPOSE: A method for determining a radiation intensity of a layout is provided to remove an inter-influence of adjacent revealed figures. CONSTITUTION: According to the method for determining the radiation intensity of a layout including a plurality of revealed figures having different feature width and different feature spacing, in order to correct an approaching effect, according to the conditions of a regular electron beam exposure, a whole layout surface(S1) is divided into different segmental partial surfaces(Fx) according to the feature width and the feature spacing. And an evaluation criteria(Kx) of the radiation intensity toward each partial surface is determined, and the corresponding evaluation criteria is allocated to each partial surface. And the regular-beam exposure is performed by considering the evaluation criteria.