| 摘要 |
PURPOSE: To make a gas transfer machine highly stable for even corrosive transfer gas and adaptive to a high speed operation by a compact structure. CONSTITUTION: In a gas transfer machine for transferring gas by performing a rotation operation for a rotor 1, a motor for driving the rotor 1 is provided with a member 11A for isolating a stator 6 and the inside of a motor rotor chamber 14. A motor rotor 7 has a structure that the rotor 7 is directly connected with an extension of a pump drive shaft 2 and the motor rotor 7 has a reluctance shape having a salient pole part of a magnetic material.
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