CHEMICAL VAPOR DEPOSITING DEVICE AND METHOD FOR SYNTHESIZING CARBON NANOTUBE USING THE SAME

摘要

PURPOSE: A chemical vapor depositing device is provided, which mass-synthesizes carbon nanotubes. And a method for synthesizing the carbon nanotube using the same is also provided. CONSTITUTION: The chemical vapor depositing device, which synthesizes carbon nanotubes on a base plate, comprises: (i) a boat(1400) which comprises many mounts(1450) supporting many base plates(1300) and many vertical shafts(1410), wherein the mounts are installed; (ii) a reaction furnace(1100) which has passages on both ends part(1110, 1130) for supplying and discharging of reaction gas and is a cuboid shape to mount the boat inside; and (iii) a heating means(1200) which is installed on the outside of the reaction furnace. The method for synthesizing the carbon nanotube comprises steps of: (i) forming a catalytic metal film on a base plate; (ii) mounting many base plate to the mounts to be parallel one another; (iii) dividing the catalytic metal film into nano-sized catalytic metal particles by supplying an etching gas to the reaction furnace; and (iv) supplying carbon source gas to the reaction furnace to respectively grow carbon nanotubes vertically aligned on the catalytic metal particles.