发明名称 SEMICONDUCTOR DEVICE, MANUFACTURING METHOD THEREFOR, AND TESTING METHOD
摘要 PURPOSE: To easily form an alignment mark that can be recognized by an existing wafer prober for a semiconductor device, that has a plurality of semiconductor elements being arranged for sealing and is positioned by image recognition for testing, its trial manufacturing method, and its testing method. CONSTITUTION: A rewiring layer 18 for connecting the electrode of a semiconductor chip 14 to an electrode pad, arranged at a specific position, is formed on a semiconductor chip 14. A metal post 16, where a solder ball 22 is to be formed, is formed on the electrode pad of the rewiring layer. On the rewiring 18, a mark member 24 is formed, where the mark member 24 provides an alignment mark arranged in a prescribed position relationship with the metal post 16. The mark member 24 is formed by the same materials quality as that of the metal post 16.
申请公布号 KR20010049480(A) 申请公布日期 2001.06.15
申请号 KR20000030396 申请日期 2000.06.02
申请人 FUJITSU LIMITED 发明人 HASEYAMA MAKOTO;HONDA TETSUO;ITO YASUYUKI;MARUYAMA SHIGEYUKI;MATSUKI HIROHISA;NAGASHIGE KENICHI;TASHIRO KAZUHIRO;YONEDA YOSHIYUKI
分类号 G01R31/26;G01R31/28;H01L21/00;H01L21/301;H01L21/56;H01L21/66;H01L21/683;H01L23/00;H01L23/12;H01L23/544;H01L27/00 主分类号 G01R31/26
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