发明名称 DEVICE AND METHOD FOR CONTROLLING SYNCHRONIZING POSITION
摘要 PURPOSE: To improve the degree of freedom in the adjustment of responsiveness to a desired value, to shorten settling time in the case of simple positioning control and to attain easy design. CONSTITUTION: A synchronizing position control device prepared for controlling the synchronizing positions of multiaxes and provided with position control means 5a to 5c based on the position feedback of respective axes and target position command value generation means 1a to 1c for generating target position command values to respective position control means 5a to 5c is also provided with conversion means 3a to 3c applying conversion based on a prescribed transmission function to respective target position command values to respective position control means 5a to 5c and outputting these converted command values to the means 5a to 5c. The characteristic of the transmission function is made identical in respective axes, the characteristic is set up as a high band interruption characteristic and its interruption frequency is set up smaller than the servo bands of all position control means 5a to 5c.
申请公布号 KR20010049414(A) 申请公布日期 2001.06.15
申请号 KR20000028554 申请日期 2000.05.26
申请人 CANON KABUSHIKI KAISHA 发明人 ITO HIROSHI
分类号 B23Q1/00;B23Q1/25;B23Q1/30;G03F7/20;G05B19/18;G05B19/414;G05D1/02;G05D3/00;G05D3/12;H01L21/027;H01L21/68;(IPC1-7):G05B19/18 主分类号 B23Q1/00
代理机构 代理人
主权项
地址