OPTICAL FILTER FOR GRATING-ASSISTED VERTICAL COUPLER

摘要

PURPOSE: An optical filter for grating-assisted vertical coupler is provided to improve the characteristics by making the first and second waveguides vertical couplers while making it easy to arrange the waveguides and enabling a simple manufacturing process. CONSTITUTION: In the method of manufacturing the optical filter for grating-assisted vertical coupler, an n-type lnP buffer layer(22) of n-type lnP is formed on an n-type lnP board. The depth is between 0.5 and 1 micro-m. A lnGaAsP first waveguide layer is formed on the buffer layer(22). The depth is between 0.3 and 0.8 micro-m, the width is between 1 and 3 micro-m and the length is between 3 and 10 m. An n-type lnGaAsP lattice layer(25) is formed 0.1 to 0.5 micro-m above the first waveguide layer. The depth is between 0.02 and 0.2 micro-m. An n-type lnP buffer layer(24) is formed blocking gaps of lattices. P-type lnGaAsP second waveguide layers(26a-d) are formed above the buffer layer(24). Finally, on the top is formed a p-type lnP clad layer.