发明名称 LONG WAVELENGTH SURFACE EMISSION TYPE OF LASER AND METHOD FOR MANUFACTURING THE SAME
摘要 PURPOSE: A long wavelength surface emission type of laser and a method for manufacturing the same are provided to form an air layer having same effect as an oxide layer using a wet etching method without using the oxide layer in forming a current confinement aperture. CONSTITUTION: In a long wavelength surface emission type of laser and a method for manufacturing the same, the long wavelength surface emission type of laser has an under mirror layer(6) formed on a substrate, an air post patterned resonate layer formed on the under mirror layer and an upper mirror layer(20). The under stage part of the upper mirror layer near the resonate layer has the air layer having a desired depth at the side wall of the upper mirror layer.
申请公布号 KR20010048104(A) 申请公布日期 2001.06.15
申请号 KR19990052644 申请日期 1999.11.25
申请人 KOREA ELECTRONICS & TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 BAEK, JONG HYEOP;KWON, O GYUN;SHIN, JAE HEON;YOO, BYEONG SU
分类号 H01S5/30;(IPC1-7):H01S5/30 主分类号 H01S5/30
代理机构 代理人
主权项
地址