发明名称 FIELD EMISSION ELEMENT AND MANUFACTURING METHOD OF THE SAME
摘要 PURPOSE: A field emission element and manufacturing method of the same are provided to minimize voltage signal distortion due to a gate electrode resistance by forming a bus-line gate electrode on a gate insulating layer in a bus-line area. CONSTITUTION: A field emission element comprises a cathode electrode(42), a gate insulating layer and a gate electrode, a microtip(48 and a bus line gate electrode(45). The cathode electrode(42) is formed in the upper of a grass substrate(40). The gate insulating layer and the gate electrode are subsequently formed so that a gate hole is patterned in the upper of the cathode electrode(42). The microtip(48) is formed in the gate hole. The bus line gate electrode(45) is formed in the upper of the gate insulating layer formed in a bus line pattern region. Therefore, the field emission element can easily control a voltage signal introduced in the gate electrode.
申请公布号 KR20010046799(A) 申请公布日期 2001.06.15
申请号 KR19990050703 申请日期 1999.11.15
申请人 INSTITUTE FOR ADVANCED ENGINEERING 发明人 HWANG, SEONG YEON
分类号 H01J1/30;(IPC1-7):H01J1/30 主分类号 H01J1/30
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