THERMO-OPTIC WAVEGUIDE SWITCH

摘要

The invention relates to a thermo-optic waveguide switch (1) which is located on a substrate. Said switch comprises a layer of glass, through which a waveguide (3, 8) extends. A hollow chamber (5) which lies beneath the waveguide thermally decouples the latter from the substrate. At least two supports (6) are located in the hollow chamber to provide mechanical stability. One production method for obtaining a thermo-optic waveguide switch consists of creating a layer of glass with an arrangement of perforations on a substrate. At least one hollow chamber containing at least two supports is formed by isotropically undercutting the glass layer. The hollow chamber is subsequently sealed and a waveguide is formed above said hollow chamber. Another production method first creates a waveguide in a layer of glass which is formed on a substrate. The layer of glass in the vicinity of the waveguide is then removed using a mask and the waveguide is at least partially undercut by an isotropic etching process, thus forming a hollow chamber containing at least two supports below the waveguide.