发明名称 FABRICATION OF PERIODIC SURFACE STRUCTURES WITH NANOMETER-SCALE SPACINGS
摘要 <p>The periodic stress and strain fields produced by a pure twist grain boundary between two single crystals bonded together in the form of a biocrystal are used to fabricate a two-dimensional surface topography with controllable, nanometer-scale feature spacings. The spacing of the features is controlled by the misorientation angle used during crystal bonding. One of the crystals is selected to be thin (10), nanometers. A buried periodic array of screw dislocations is formed at the twist grain boundary (19). To bring the buried periodicity to the surface, the thin single crystal (20) is etched to reveal an array of raised elements (22), such as pyramids, that have nanometer-scale dimensions. The process can be employed with numerous materials, such as gold, silicon and sapphire. In addition, the process can be used with different materials for each crystal such that a periodic array of misfit dislocations is formed at the interface between the two crystals.</p>
申请公布号 WO2001042540(A1) 申请公布日期 2001.06.14
申请号 US2000032440 申请日期 2000.12.07
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