METHOD, APPARATUS, AND COMPOSITION FOR DRYING SOLID ARTICLES

摘要

Disclosed herein is an apparatus, method and drying agent composition for drying solid articles such as semiconductor wafers. The dryer (10) comprises a process tank (12) and a drying fluid supply system (100). The process tank (12) includes a plurality of spray nozzles (15) to spray a non-flammable drying fluid to wet surfaces of the article for drying without the necessity of heat or other external means. The drying fluid comprises a non-flammable, environmentally compatible, and non-hazardous fluid including a drying agent of hydrofluoroether and a surfactant of isopropyl alcohol. Even without the benefit of heating, little if any solution or static charge remains after drying. The dryer (10) includes a drying fluid supply system (100) for providing the drying fluid to the plurality of spray nozzles. The drying agent composition comprises a mixture of hydrofluoroether and a tertiary alcohol such as tertiary butyl alcohol.