摘要 |
<p>A filter membrane, methods of making such filter membrane and apparatus employing such filter membrane are disclosed, in which the filter membrane is a monolithic polymeric membrane (20) that includes a polymeric filter layer (22) including a micro-scale precision-shaped pores (24) and a polymeric support layer (26) that has a precision-shaped porous support for the filter layer. Several methods are disclosed for making such a membrane using micromachining technique, including lithographic, laser ablation and x-ray treatment techniques. Several filter apparatuses employing such a membrane are disclosed.</p> |