| 摘要 |
An apparatus for feeding semiconductor chips has a structural body having grooves which serve respectively as parallel feed paths for semiconductor chips, the feed paths corresponding to respective quality levels of the semiconductor chips, the structural body being made of partially stabilized zirconia. A stopper mechanism for temporarily stopping semiconductor chips fed along the feed paths comprises piezoelectric bodies disposed in the feed paths in front of terminal walls of the feed paths. A counter mechanism for counting semiconductor chips fed along the feed paths have electrodes disposed in the feed paths near the terminal walls. The apparatus serves as a feed system for floating articles with ejected air and feeding the floated articles, and lends itself to being automatized.
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