SELF-ALIGNED CONTACTS FOR SEMICONDUCTOR DEVICE,申请号IL19980137016-传众专利搜索

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发明名称	SELF-ALIGNED CONTACTS FOR SEMICONDUCTOR DEVICE
摘要
申请公布号	IL137016(D0)	申请公布日期	2001.06.14
申请号	IL19980137016	申请日期	1998.12.11
申请人	LAM RESEARCH CORPORATION	发明人
分类号	H01L21/302;H01L21/3065;H01L21/311;H01L21/3213;H01L21/60;(IPC1-7):H01L	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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