Production of small ceramic components used in microsystems comprises forming a green body by applying a dispersion of metal oxide particles and an inorganic sol to a mold, drying and calcining in a furnace

摘要

Production of small ceramic components comprises forming a green body by applying a dispersion of metal oxide particles and an inorganic sol to a mold; drying and calcining the dry porous green body produced in a furnace. Preferred Features: The metal oxide particles have an average particle size of 0.01-5 mu m. The sol is a commercial slightly basic silica sol. The metal oxide particles are oxides of different materials.