Charged particle beam evaluation method,申请号EP20000118879-传众专利搜索

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发明名称	Charged particle beam evaluation method
摘要
申请公布号	EP1081742(A3)	申请公布日期	2001.06.13
申请号	EP20000118879	申请日期	2000.08.31
申请人	APPLIED MATERIALS, INC.	发明人	PEARL, ASHER;RODGERS, STEVEN R.;LIBINSON, ALEXANDER
分类号	G01N23/20;G01N23/225;G01Q20/04;G01Q30/04;G01Q30/20;H01J37/04;H01J37/20;H01J37/28;(IPC1-7):H01J37/28	主分类号	G01N23/20
代理机构		代理人
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