Plate valve used in vacuum systems has guide plate installed on longitudinal guide parallel to sealing face and connected to linear drive to move sealing plate, with guide plate and sealing plate pressed together by tension springs

摘要

The plate valve comprises a sealing plate movable over a sealing face. A guide plate(3) installed on a longitudinal guide(7) parallel to the sealing face is connected to a linear drive(8) and moves the sealing plate. The guide plate and sealing plate are pressed together by means of tension springs(6). Tilting elements(9) in the form of leaf springs are located between the guide plate and sealing plate, and end stops are provided for the sealing plate. The sealing plate has a vacuum seal(11) on the side facing the opening(2) to be closed off.