REACTION FORCE ISOLATION SYSTEM FOR A PLANAR MOTOR,申请号EP19990943701-传众专利搜索

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发明名称	REACTION FORCE ISOLATION SYSTEM FOR A PLANAR MOTOR
摘要
申请公布号	EP1105780(A1)	申请公布日期	2001.06.13
申请号	EP19990943701	申请日期	1999.08.12
申请人	NIKON CORPORATION	发明人	HAZELTON, ANDREW, J.;HAYASHI, YUTAKA;TANAKA, KEIICHI;ITO, NOBUKAZU
分类号	G12B5/00;F16F15/02;G03F7/20;G03F9/00;G12B9/08;H01L21/027;H01L21/68;H02K41/03;(IPC1-7):G05B5/01;G05B11/01;B64C17/06	主分类号	G12B5/00
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