Process for coating the inner surface and/or the components of a reactor vessel comprises introducing a gas mixture containing a titanium dispenser and a nitrogen dispenser and depositing titanium nitride onto the surface and/or components

摘要

Process for coating the inner surface and/or the components of a reactor vessel (14) of a reactor (2) comprises introducing a gas mixture containing a titanium dispenser and a nitrogen dispenser into the reactor vessel and depositing titanium nitride from the mixture onto the inner surface of the reactor and/or components of the reactor vessel. Preferred Features: A plasma is produced within the reactor vessel to deposit the titanium nitride. The titanium dispenser is titanium tetrachloride. The nitrogen dispenser is nitrogen gas. The gas mixture contains a noble gas, preferably argon.