| 摘要 |
Use of an amorphous carbon layer with piezo-resistive properties as a sensor for measuring actual condition parameters on surfaces of mechanical components is new. An Independent claim are also included for: (a) a process for measuring the actual condition parameters on surfaces of mechanical components using the above carbon layer as sensor; and (b) a sensor arrangement for measuring the actual condition parameters on surfaces of mechanical components, in which the carbon layer is connected to a measuring device via electrical contacts. Preferred Features: The amorphous carbon layer is doped with Si, Ti, W, Cr, Ta, Nb, V, Zr, Hf, Mo, Pb, Cu, Al, Au, Ag, Pt, Ru, Pd, Ni, Co, O, N, Ar, F and/or H.
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