| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a master disk for a high-accuracy and high-density optical information recording medium which assures the uniformity of the thickness of a resist coating film on a substrate surface in order to increase the memory capacity of the optical information recording medium, such as optical disk. SOLUTION: The method for manufacturing the master disk of the optical information recording medium including a means for applying a primer 19 on a glass substrate 2, a means for drying this primer 19, a means for applying a photoresist 13 onto a primer layer 20 and a means for drying the applied photoresist 13 consists of stages for repeating the steps of applying the primer 19 on the glass substrate 2 within a closed vessel 1, then forcibly discharging the gas evaporated from the primer 19 from the vessel 1, applying the primer 19 in the enclosed vessel 1 and forcibly discharging the evaporated gas of the primer 19 in the same manner as described above, then applying the photoresist 13 in the reclosed vessel 1 and opening the inside of the vessel to the outdoor air, thereby drying the photoresist. |
