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发明名称
Microelectromechanical system sensor assembly
摘要
申请公布号
AU3435101(A)
申请公布日期
2001.06.12
申请号
AU20010034351
申请日期
2000.11.30
申请人
CALIFORNIA INSTITUTE OF TECHNOLOGY
发明人
YU-CHONG TAI;SHUYUN WU;QIAO LIN
分类号
G01F1/684
主分类号
G01F1/684
代理机构
代理人
主权项
地址
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