发明名称 CONTACT STRUCTURE WITH SILICON FINGER CONTACTOR AND TOTAL ASSEMBLY STRUCTURE USING IT
摘要 PROBLEM TO BE SOLVED: To provide contact structure that has a high-frequency band and a number of pins, and achieves high-performance and reliable contact performance by coming into contact with a contact target for establishing electrical communication. SOLUTION: In the contact structure, a plurality of finger-shaped contactors are mounted onto a contact substrate. Each contactor is composed of a silicon base that has a slant support, an insulation layer that is formed on the silicon base for projecting from the slant support, and a conductive layer that is formed by a conductive material on the insulation layer for forming the beam of the contactor with the insulation layer. When the tip of the beam of the contactor is pushed to a contact target, spring force is generated in the horizontal direction of the beam for forming contact pressure. To mount the contactors onto the contact substrate, an adhesive is applied.
申请公布号 JP2001159642(A) 申请公布日期 2001.06.12
申请号 JP20000314444 申请日期 2000.10.10
申请人 ADVANTEST CORP 发明人 KHOURY THEODORE A;FRAME JAMES W
分类号 G01R31/26;G01R1/067;G01R1/073;H01L21/66;(IPC1-7):G01R1/073 主分类号 G01R31/26
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