| 摘要 |
PROBLEM TO BE SOLVED: To aim at improving performance of the ion source. SOLUTION: A pair of mirror magnets 10 in the ion source are respectively provided by containing a coil or a permanent magnet in a yoke 11. A side yoke 11-1 on the mirror magnets at the pullout electrode side was equipped with an opening to let the ion beam pass, and the shape of the opening was made into rotationally asymmetric shapes such as oval and ellipse. This smoothes the flow of the ion beam.
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