2-PULSE UTILIZED OPTICAL INTERFEROMETER FOR PRECISION INSPECTION WITH WAVEFORM OF INTEGRATED CIRCUIT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an interferometer type method for a waveform probe requiring no setting of a reference point near the active region on a semiconductor IC device (DUT) without affected by mechanical vibration nor temperature- induced movement of the DUT. SOLUTION: A semiconductor integrated circuit device DUT 640 is provided with probe light pulse and reference pulse during each repetition cycle of the electric test pattern signal applied repeatedly, for guiding the same optical path as to sample the electric waveform on the DUT. The pulse width of the probe pulses is shorter than the cycle of maximum frequency component signal of the test pattern, for wide band measurement of the test pattern waveform. The reference pulse is supplied at a fixed time point to the test pattern. During a series of test pattern cycles, scanning with a probe pulse 609 of the test pattern is performed so that it is vertical to an equivalent time sampling for re- configuration of DUT waveform.