MULTIPLE TIER COLLIMATOR SYSTEM FOR ENHANCED STEP COVERAGE AND UNIFORMITY,申请号EP19960903508-传众专利搜索

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发明名称	MULTIPLE TIER COLLIMATOR SYSTEM FOR ENHANCED STEP COVERAGE AND UNIFORMITY
摘要
申请公布号	EP0809859(B1)	申请公布日期	2001.06.13
申请号	EP19960903508	申请日期	1996.01.11
申请人	ADVANCED MICRO DEVICES INC.	发明人	KRIVOKAPIC, ZORAN;BANG, DAVID, S.
分类号	H01J37/34;(IPC1-7):H01J37/34	主分类号	H01J37/34
代理机构		代理人
主权项
地址

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