| 摘要 |
PROBLEM TO BE SOLVED: To suppress generation of the vibration when a movable table is stopped in a position control device to control the position of the movable table through the feedback control. SOLUTION: The movable table 8 is driven by a motor 5 through the feedback control. When a stop judging unit 20 judges that the movable table 8 is stopped, a switch 21 forms a circuit so that the torque command value S7 of the motor is directly given to an amplifier 4. On the other hand, if it is judged that the movable table 8 is during the movement, the switch 21 forms a circuit so that the torque command value S7 is given to the amplifier 4 via a low-pass filter 3. When the movable table 8 is stopped, generation of the vibration can be suppressed without being affected by the phase delay associated by the passing in the low-pass filter. During the movement, high frequency components are eliminated by the low-pass filter, and the resonance of the mechanical system is prevented.
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