发明名称 FILM FORMING METHOD, ITS APPARATUS, AND FLATTENING MEDIUM
摘要 PROBLEM TO BE SOLVED: To provide a film forming method to form a uniform layer formed of a substance on an article by bringing a flattening medium m consisting of a magnetic substance deposited with the substance forming a film into contact with an article 17 deposited with the substance forming the film in the magnetic field to flatten the unevenness of the substance deposited on the article. SOLUTION: The article has small holes, deep holes, sharp corners and narrow gaps, and even when several flattening media are trapped in these small holes, deep holes, sharp corners and narrow gaps, they are attracted by the magnetic force of the flattening media adjacent to the trapped flattening media, and be drawn out of the small holes, deep holes, sharp corners and narrow gaps. Thus, different from the conventional practice, the flattening media can be prevented from being trapped in the small holes, deep holes, sharp corners and narrow gaps formed in the article.
申请公布号 JP2001158977(A) 申请公布日期 2001.06.12
申请号 JP19990343021 申请日期 1999.12.02
申请人 INTER METALLICS KK 发明人 ITAYA OSAMU;SAGAWA MASATO
分类号 B05C11/02;C23C26/00;(IPC1-7):C23C26/00 主分类号 B05C11/02
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