发明名称 |
Method for producing fluorinated diamond-like carbon films |
摘要 |
Fluorinated, diamond-like carbon (F-DLC) films are produced by a pulsed, glow-discharge plasma immersion ion processing procedure. The pulsed, glow-discharge plasma was generated at a pressure of 1 Pa from an acetylene (C2H2) and hexafluoroethane (C2F6) gas mixture, and the fluorinated, diamond-like carbon films were deposited on silicon <100>substrates. The film hardness and wear resistance were found to be strongly dependent on the fluorine content incorporated into the coatings. The hardness of the F-DLC films was found to decrease considerably when the fluorine content in the coatings reached about 20%. The contact angle of water on the F-DLC coatings was found to increase with increasing film fluorine content and to saturate at a level characteristic of polytetrafluoroethylene. |
申请公布号 |
AU2905901(A) |
申请公布日期 |
2001.06.12 |
申请号 |
AU20010029059 |
申请日期 |
2000.11.30 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA, |
发明人 |
MICHAEL A. NASTASI;DEOK-HYUNG LEE;XIAO-MING HE;MARKO J. HARKOVIRTA |
分类号 |
C23C16/26;C23C16/30;C23C16/515 |
主分类号 |
C23C16/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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