| 摘要 |
An apparatus for moving substrates between a loading section and a working chamber includes at least two loading locations at which the substrates may be supplied or received in stacked form therein. Load locks are provided at a second station each located directly oppositely of the locations at the loading station and corresponding in number to those locations. A substrate handling mechanism is disposed between the loading and the second stations for picking up and moving the substrates between the loading and second stations and includes linear positioning apparatus movable along a track of given width for positioning the handling mechanism along the given line, and the loading and second stations being separated from one another substantially only by the given width of the linear positioning apparatus. |
